Calibration Grating Set TGZ1,TGZ2,TGZ3,TGX1,TGG1,TGT1
Grating set TGS2 can be used for:
- lateral and vertical calibration;
- detection of lateral non-linearity;
- detection of hysteresis, creep, and cross-coupling effects;
- detection of angular distortion;
- for 3-D visualization of the scanning tip;
- determination of tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
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